C C C C !ª.3. B¶. p ÁBrBtB B 4? B B¨BsBbBjB · 2017. 4. 8. · mems-oneb b¨bsbbbjb p ß.o : :...
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MEMS-ONE MEMS 6-2-5 MEMS-ONE p. 36-39
Transcript of C C C C !ª.3. B¶. p ÁBrBtB B 4? B B¨BsBbBjB · 2017. 4. 8. · mems-oneb b¨bsbbbjb p ß.o : :...
MEMS-ONEMEMS
6-2-5
MEMS-ONE
p. 36-39
MEMS-ONE
MEMS
MEMS MEMS
p. 36-39
MEMS-ONE
DB( )
DB(
)
etc
Excel
Excel
p. v-4
MEMS-ONE
p. v-10
MEMS-ONE
1
2
3
1
2
3
4
1-1
1-2
1-3
1
2
1
2
3
1
2
3
1
2
3
1
2
3
p. v-2
MEMS-ONE
p. v-13,v-14
MEMS
MEMS-ONE
p. v-8
MEMS-ONE
p. v-12, v-13
MEMS-ONE
A B CAA BB CCA B CAA
MEMS
,DRIE,
DRIE RIE
DRIE••••
• (100)•••
RIE•••
••
p. v-24
MEMS-ONE
p. v-27
MEMS-ONE
(DRIE)(DRIE)
90 =90 9090 =90 9090 =90 9090 =90 9090 =90 9090 =90 90
•
•
p. v-33
MEMS-ONE
0.6 m39kHz
p. v-37
MEMS-ONE
S-N 23 50/25 RH
•
••
p. v-39
MEMS-ONE
COP
p. v-42, v-52
(GPa) (MPa) (ppm/ )PMMA 5.1-5.3
5.8-6.6Ni 40-110 9-11 (40-120 )
A 200-220Ni 140-230 8-10 (40-120 )
B 150-190SOG 6.4-7.8
2.9-3.13.2-3.5 RT-500
Si 181-1822.9-4.0 (RT-1000 )
MEMS-ONE
MemsONEMemsONE
p. v-51
MEMS-ONE
MEMS
p.75-78
MEMS-ONE
p.90,91