Student PresentatiFDons 2011

download Student PresentatiFDons 2011

of 102

Transcript of Student PresentatiFDons 2011

  • 7/24/2019 Student PresentatiFDons 2011

    1/102

    John D. Cressler, 7/06 1

    Generalized Magneto-OpticalEllipsometry

    Nelson E. Lourenco

    ECE 4813 - Semiconductor Materials and Device Characterization

    Dr. Alan Dool itt le

    School of Electrical and Computer Engineering

    85 5thStreet, N.W., Georgia Institute of Technology

    Atlanta, GA 30308 USA

    [email protected]

  • 7/24/2019 Student PresentatiFDons 2011

    2/102

    John D. Cressler, 7/06 2

    Fundamentals of Polarized Light

    Overview of Traditional Ellipsometry

    Magneto-Optical Characterization

    Generalized Magneto-Optical Ellipsometry

    Vector Generalized Magneto-Optical

    Ellipsometry (Vector Magnetometer)

    Outline

  • 7/24/2019 Student PresentatiFDons 2011

    3/102

    John D. Cressler, 7/06 3

    Light Polarization

    Light can be fully polarized, partially polarized, unpolarized

    - Fully Polarized Light

    Linearly Polarized

    Elliptically Polarized

    D.K. Schroder Semiconductor Device and Material Characterization, 3rd Ed.

  • 7/24/2019 Student PresentatiFDons 2011

    4/102

    John D. Cressler, 7/06 4

    Developed by Dr. Robert Clark Jones

    - Developed between 1941-1956 at Harvard / Polaroid Corporation

    - Mathematical model for describing polarized coherent light

    - Randomly polarized, partially polarized, and incoherent light

    cannot be modeled using Jones Calculus

    Mueller Calculus (Stokes Vectors)

    Jones Calculus

    G.G. Fuller Optical Rheometry of Complex Fluids, 1st Ed.

  • 7/24/2019 Student PresentatiFDons 2011

    5/102

    John D. Cressler, 7/06 5

    Polarized light represented by Jones Vector

    - Linearly Polarized Light

    X-Direction: Y-Direction:

    - Circular Polarized Light

    Left-Hand (LHCP): Right-Hand (RHCP):

    Linear Optical Element represented by Jones Matrix

    - Horizontal Linear Polarizer:

    - Vertical Linear Polarizer:

    - Right Circular Polarizer:

    Jones Calculus contd.

  • 7/24/2019 Student PresentatiFDons 2011

    6/102

    John D. Cressler, 7/06 6

    Interested in optical parameters of thin fi lms and/or

    semiconductor substrates

    - Air (n0) Semiconductor (n1 jk1) Interface

    - Air (n0) Thin Film (n1) Semiconductor (n2 jk2) Interface

    - Complex Index of Refraction: = n jk

    n: phase velocity in mediumk: absorption loss through medium

    Example: Null Ellipsometry (PCSA)

    Traditional Ellipsometry

    R.M. Azzam Ellipsometry and Polarized Light, 1st Ed.

  • 7/24/2019 Student PresentatiFDons 2011

    7/102

    John D. Cressler, 7/06 7

    Applications

    - Optical Properties of Materials

    - Film Thickness- Film Deposition / Etching

    Process Control

    In-situ Monitoring

    GT MiRC Cleanroom

    - Woollam Ellipsometer- Plas-Mos Ellipsometer

    Traditional Ellipsometry

    Photos courtesy of GT Microelectronics Research Center

  • 7/24/2019 Student PresentatiFDons 2011

    8/102

    John D. Cressler, 7/06 8

    Traditional Ellipsometry determine optical properties, but

    there are also magneto-optical properties

    - Magneto-Optical Storage Devices

    Ultra thin-film magnetism

    - Ferromagnetic Materials

    Rare-Earth MagnetsFerrofluids

    Faraday Effect

    - Occurs for light propagating through magnetic fields and magneticmaterials

    - Rotation of the plane of polarization

    M-O Motivation

    S. Mancuso `Faraday Rotation and Models (2000)

  • 7/24/2019 Student PresentatiFDons 2011

    9/102

    John D. Cressler, 7/06 9

    Full Magneto-Optical Characterization Process (2 Steps)- Optical Characterization

    = n jk- Magneto-Optical Characterization

    Q = Qr jQi(Complex Magneto-Coupling Constant)

    Magnetization Orientation Can we simplify this setup?

    M-O Characterization

    Magneto-optical Ellipsometer

    P. Q. J. Nederpel & J. W. D. Martens

    January 3rd, 1985

  • 7/24/2019 Student PresentatiFDons 2011

    10/102

    John D. Cressler, 7/06 10

    Developed by Andreas Berger and Matthew Pufall at

    University of California San Diego (1997)

    - Complete magneto-optical characterization

    - Combine two-step process into one measurement

    Measurement Setup- HeNe Laser (=632.8 nm)

    - Rotatable Polarizers (Glan-Taylor)

    - Torroidal Ferrite Magnet

    - Photodiode Detector

    GMOE

    A. Berger Generalized Magneto-Optical Ellipsometry, (1997)

  • 7/24/2019 Student PresentatiFDons 2011

    11/102

    John D. Cressler, 7/06 11

    Electric Field Vector at Detector

    ED=P2*R*P1*EL

    Glan-Taylor Polarizers defined by Jones matrix

    Reflection (Jones Matrix) of sample

    Light Intensity I at detector D

    ** Linear approximation: and switch signs at magnetization

    reversal **

    GMOE contd.

  • 7/24/2019 Student PresentatiFDons 2011

    12/102

    John D. Cressler, 7/06 12

    Fractional intensity change at photodetector, I/I

    GMOE contd.

    A. Berger Generalized Magneto-Optical Ellipsometry, (1997)

  • 7/24/2019 Student PresentatiFDons 2011

    13/102

    John D. Cressler, 7/06 13

    Example Data (from Berger & Pufall)

    GMOE contd.

    A. Berger Generalized Magneto-Optical Ellipsometry, (1997)

  • 7/24/2019 Student PresentatiFDons 2011

    14/102

    John D. Cressler, 7/06 14

    Generalized Magneto-Optical Ellipsometry can be used as

    a vector magnetometer- Andreas Berger and Mathew Pufall

    - Measurement of H vs. M dependence

    Vector GMOE

    A. Berger Quantitative Vector Magnetometry using Generalized Magneto-Optical Ellipsometry, (1997)

  • 7/24/2019 Student PresentatiFDons 2011

    15/102

    John D. Cressler, 7/06 15

    [1]D.K. Schroder, Optical Characterization, in Semiconductor Material and Device

    Characterization, 3rd ed. 2006

    [2]G.G. Fuller, Optical Rheometry of Complex Fluids, 1st ed. 1995

    [3]R.M.A. Azzam,Ellipsometry and Polarized Light, 1st ed. 1988

    [4]A. Berger, Generalized Magneto-Optical Ellipsometry,Appl. Phys. Lett.,

    vol. 71, no. 7,pp. 965-967, August, 1997.

    [5]A. Berger, Quantitaive Vector Magnetometry using Generalized Magneto-Optical

    Ellipsometry,J. Appl. Phys., vol. 85, no. 8,pp. 4583-4585, April, 1999.

    [1]D.K. Schroder, Optical Characterization, in Semiconductor Material and Device

    Characterization , 3rd ed. 2006

    References

  • 7/24/2019 Student PresentatiFDons 2011

    16/102December 2, 2011 [email protected]

    Scanning Probe Microscopy

    (SPM)

    Brendan GunningECE 4813

  • 7/24/2019 Student PresentatiFDons 2011

    17/102December 2, 2011 [email protected]

    SPM Flavors

    AFM(Atomic Force Microscopy) C-AFM(Conductive Atomic Force Microscopy) BEEM (Ballistic Electron Emission Microscopy)

    EFM (Electrostatic Force Microscopy) KPFM(Kelvin Probe Force Microscopy) NSOM(Near-field Scanning Optical Microscopy) SCM(Scanning Capacitance Microscopy) STM(Scanning Tunneling Microscopy) And more

  • 7/24/2019 Student PresentatiFDons 2011

    18/102December 2, 2011 [email protected]

    Conductive Atomic Force

    Microscopy(C-AFM)

  • 7/24/2019 Student PresentatiFDons 2011

    19/102

    Like AFM but its conductive (duh)

    Cantilever/tip is coated in conductive film (Pt, Pt-Ir, etc)

    Apply bias to tip, ground samplecontact

    Current flows

    And you can still

    get topography!

    December 2, 2011 [email protected]

    Conductive AFM

  • 7/24/2019 Student PresentatiFDons 2011

    20/102

    December 2, 2011 [email protected]

    Current Mapping

    Scan across surface

    Areas with different conductivity will havedifferent currents

    Map currentlike you do withtopography

    http://www.nrel.gov/pv/measurements/conductive_atomic.html

  • 7/24/2019 Student PresentatiFDons 2011

    21/102

    December 2, 2011 [email protected]

    Processing Characterization

    as-grown CdTe/CdS Solar Cell CdTe/CdS Solar Cell

    after bromine-methanol etch

    Moutinho et al., Conductive Atomic Force Microscopy Applied toCdTe/CdS Solar Cells, 2004.

  • 7/24/2019 Student PresentatiFDons 2011

    22/102

    December 2, 2011 [email protected]

    More Current Mapping

    Hsu et al., Direct imaging of reverse-bias leakagethrough pure screw dislocations in GaN films

    grown by molecular beam epitaxy on GaN

    templates, 2002.

    Mapping the currentcan shed light on

    things like:Defects

    Composition

    Contamination

  • 7/24/2019 Student PresentatiFDons 2011

    23/102

    December 2, 2011 [email protected]

    More Current Mapping

    Dong et al., Effects of hydrogen on the morphology and electricalproperties of GaN grown by plasma-assisted molecular-beam

    epitaxy, 2005.

    Top samples are GaNgrown with just N2

    Bottom samples grownwith H2and N2

    H2passivated dangling

    bonds, reducingelectrical activity

  • 7/24/2019 Student PresentatiFDons 2011

    24/102

    December 2, 2011 [email protected]

    Scanning Current-VoltageMicroscopy (SIVM)

    Tip is held at one x-y

    location, contactingsurface

    Sweep voltage

    measure current flow

    Moutinho et al., Conductive Atomic Force Microscopy Applied toCdTe/CdS Solar Cells, 2004.

    I-V curve of CdTe/CdS taken byconductive AFM

  • 7/24/2019 Student PresentatiFDons 2011

    25/102

    December 2, 2011 [email protected]

    Unintended Side-Effectsof C-AFM

    Scan across surface

    Current shown in (b)

    Dark regions

    largercurrent

    The current flowingactually grew an

    island-like feature seenin (c)

    Miller et al., Reduction of reverse-bias leakage current in Schottkydiodes on GaN grown by molecular-beam epitaxy using surface

    modification with an atomic force microscope, 2002.

  • 7/24/2019 Student PresentatiFDons 2011

    26/102

    December 2, 2011 [email protected]

    Cross Sectional C-AFM

    Look at cross section to probe:

    Multiple layers

    Interfaces

    Hsu et al., Scanning Probe Studies of Defect DominatedElectronic Transport in GaN

  • 7/24/2019 Student PresentatiFDons 2011

    27/102

    December 2, 2011 [email protected]

    Scanning Tunneling Microscopy(STM)

  • 7/24/2019 Student PresentatiFDons 2011

    28/102

    December 2, 2011 [email protected]

    STM Apparatus andProcedure

    Coarse control brings tip (W, Pt-Ir, or Au) close to sample

    Once close enough, z-piezo brings tip within tunneling range (~5)

    Z-piezo steps down until preset tunneling current is reached

    As the tip rasters, changes intopography will increase/decreasecurrent

    Feedback raises/lowers tip tomaintain constant current

    The distance the tip wasraised/lowered forms thetopography image

  • 7/24/2019 Student PresentatiFDons 2011

    29/102

    December 2, 2011 [email protected]

    STM Images

    Feenstra et al., Reconstruction of GaN and InGaN Surfaces, 2000.

    Pit in N-polar GaN onSapphire

    GaN on 6H-SiC

    0.4off-cut

    Regular(0001)

    200 nm 1 m

    500 nm 2 mCui et al., Suppression of Spiral Growth in Molecular Beam Epitaxyof GaN on Vicinal 6H-SiC (0001), 2001.

  • 7/24/2019 Student PresentatiFDons 2011

    30/102

    December 2, 2011 [email protected]

    Our STM Images

    Me! 2010

    Dirty, non-annealed Gold(726nm scan size)HOPG Highly Ordered

    Pyrolytic Graphite(3nm scan size)

  • 7/24/2019 Student PresentatiFDons 2011

    31/102

    December 2, 2011 [email protected]

    Empty vs. Filled States

    http://physics.usask.ca/~mitchell/facilities.html

    15nm

    15nm

    7x7 surface reconstruction of Si (111) 1.5nA tunneling current

    +2V bias = Empty states -2V bias = Filled states

  • 7/24/2019 Student PresentatiFDons 2011

    32/102

    December 2, 2011 [email protected]

    What else can we do?

    Rather than just sweeping across thesurface with a set bias

    STS sweeps the bias at a fixed x-y-z

    position

    Generates a local I-V curve,representing the integrated density ofstates at that position as a function of

    energy

    The derivative of this I-V curve, dI/dV,can tell us even more

  • 7/24/2019 Student PresentatiFDons 2011

    33/102

    December 2, 2011 [email protected]

    Scanning TunnelingSpectroscopy

    Instead of the integrated density of states, the dI/dVspectrum shows us the actual density of states at thatlocation as a function of energy

    Can use the density of statesdata to create a map acrossa sample area at a chosenenergy

  • 7/24/2019 Student PresentatiFDons 2011

    34/102

    December 2, 2011 [email protected]

    Conclusion

    SPM covers a huge variety of more specificcharacterization methods

    Each one of these characterization methods isuseful in and of itself

    Whether its C-AFM, STM, or some other method

    SPM is an extremely useful and powerfulcharacterization tool

  • 7/24/2019 Student PresentatiFDons 2011

    35/102

    December 2, 2011 [email protected]

  • 7/24/2019 Student PresentatiFDons 2011

    36/102

    Light Beam InducedCurrent/Voltage

    Guy RazECE 4813 Dr. Alan Doolittle

    Fall 2011

  • 7/24/2019 Student PresentatiFDons 2011

    37/102

    2

    Motivation

    The development and production of polycrystalline solar

    cells creates a necessity for analysis with high spatial

    resolution

    Contactless probes can be used to examine:

    EBIC - has been widely applied

    LBIC is more appropriate for solar cells

    for study of defects

    LBIV measuring VOC instead of JSC

  • 7/24/2019 Student PresentatiFDons 2011

    38/102

    3

    Solar Cell Modeling

    For a short circuit current (LBIC method) where V=0

    For open circuit voltage (LBIV method)

    Figure and Equations from: Salinger, Benda & Machacek

    p

    sssPVsc

    R

    IR

    kT

    IReI

    kT

    IReIAJI = ]1)

    2[exp(]1)[exp( 0201

    )2

    )(4ln(

    2

    01

    010201

    2

    0202

    I

    AJIIIII

    e

    kTV

    PV

    oc

    ++++

    =

  • 7/24/2019 Student PresentatiFDons 2011

    39/102

    4

    Solar Cell Modeling (cont.)

    LBIC measurements are made around V=0

    Slope is low, current changes slowly

    LBIV made around I = 0

    Figure and Equations from: Salinger, Benda & Machacek

  • 7/24/2019 Student PresentatiFDons 2011

    40/102

    5

    Introduction

    When a light beam strikes a semiconductor, it will

    generate electron-hole pairs (EHPs) within the beams

    interaction volume.

    These EHPs will be separated by drift due to the internal

    electric field. The E/Hs can be collected at the contacts of the object.

    Amplifying and analyzing these measurements show

    variations in generation, drift and recombination which

    can be measured and displayed.

  • 7/24/2019 Student PresentatiFDons 2011

    41/102

    6

    Apparatus

    Figure from: Hiltner & Sires

  • 7/24/2019 Student PresentatiFDons 2011

    42/102

    7

    Quantum Efficiency

    QE is the ratio of the number of charge carriers collected

    by the solar cell to the number of photons shinning on

    the solar cell.

    EQE

    ISC is dependent on the amount of absorbed light

    Corrected by first factor

    )//(

    /

    1

    1

    chP

    eI

    RIQE

    L

    sc

    =

  • 7/24/2019 Student PresentatiFDons 2011

    43/102

    8

    Photon Penetration/Absorption

    Energy of a photon depend only on its wavelength by

    The depth of penetration depend on Energy (KeV) and

    material. (silicon example)

    http://micro.magnet.fsu.edu/primer/java/digitalimaging/ccd/quantum/

    chE

    =

    Wavelength (nm) Penetration Depth (m)

    400 0.19

    500 2.3

    600 5.0

    700 8.5

    800 23

    900 62

    1000 470

    http://micro.magnet.fsu.edu/primer/java/digitalimaging/ccd/quantum/http://micro.magnet.fsu.edu/primer/java/digitalimaging/ccd/quantum/
  • 7/24/2019 Student PresentatiFDons 2011

    44/102

    9

    Diffusion Length

    Photo-induced current decay is dependant on the

    relative thickness of sample

    It is necessary to consider two cases when analyzing LBIC

    intensity :

    Thick Sample Cases (W> 4Lb) Thin Sample cases (W< 4Lb)

  • 7/24/2019 Student PresentatiFDons 2011

    45/102

    10

    Sample Cases

    Thick Sample Cases (W> 4Lb)

    EBIC intensity as a function of distance x from the barrier,

    in a semiconductor of semi-infinite thickness and far from

    the collector edge (x>> Lb)

    Thin Sample Cases (W < 4Lb)

    In thin samples, the influence of the front and rear surfacerecombination becomes very important

    Equations from: Sayad, Kaminski, Blanc, Nouiri & Lemiti

    n

    b

    xLxCxI = )exp()(

    )exp()( 0effL

    xIxI =

  • 7/24/2019 Student PresentatiFDons 2011

    46/102

    11

    Surface Recombination Velocity

  • 7/24/2019 Student PresentatiFDons 2011

    47/102

    12

    LBIC topography

    Imaging carried out using 100 line with 100 points each

    at a step of 10m

    Solar cell area is 1mm2

    Minority carrier recombination is clearly evident

    Photocurrent reduced by 25% near grain boundary

    Figure from: Masri, Boyeaux, Kumar, Mayet & Laugier

  • 7/24/2019 Student PresentatiFDons 2011

    48/102

    13

    LBIC topography (cont.)

  • 7/24/2019 Student PresentatiFDons 2011

    49/102

    14

    Light Sweep

  • 7/24/2019 Student PresentatiFDons 2011

    50/102

    15

    Resolution

    Figures from: Sites & Nagle

  • 7/24/2019 Student PresentatiFDons 2011

    51/102

    16

    Defect Detection

    Figures from: Sites & Nagle

  • 7/24/2019 Student PresentatiFDons 2011

    52/102

    17

    LBIC Variations

    Wavelength Variation

    Figures from: Sites & Nagle

    Bias Variation

    i

  • 7/24/2019 Student PresentatiFDons 2011

    53/102

    18

    Quiz

    1. What does LBIC stand for?

    2. How is light generated for the LBIC apparatus?

    3. What is the limit for defining a thick/thin sample?

    (W >/< ___)

    4. Which would have a greater affect on the Isc? Rsor Rp

    5. What is the highest resolution that can be seen with LBIC?

  • 7/24/2019 Student PresentatiFDons 2011

    54/102

    Vibrating SampleMagnetometer

    Brooks TellekampECE 4813

    November 2011

    O li

  • 7/24/2019 Student PresentatiFDons 2011

    55/102

    2

    Outline

    Overview of Magnetic Properties

    Units

    Basic Magnetic Relations

    History

    VSM Basics

    Mechanical Design

    Properties of VSM

    O i f M i P i

  • 7/24/2019 Student PresentatiFDons 2011

    56/102

    3

    Overview of Magnetic Properties

    B = Magnetic Flux Density or Magnetic Induction

    H = Magnetic Field (typically applied to a sample)

    m = Magnetic Dipole Moment

    M = Magnetization

    = Magnetic Permeability

    Permeability of free space 0= 4 107

    (SI)

    = Magnetic Susceptibility

    U it

  • 7/24/2019 Student PresentatiFDons 2011

    57/102

    4

    Units

    Gaussian units a physical system for electromagnetic

    units based in CGS (centimeter-gram-second) base units

    Unit SI CGS Conversion

    B Tesla Gauss 1T=10,000G

    H

    Oersted (Oe)

    =

    1000Oe

    m (

    )

    = 1000

    M

    =

    3

    = .001

    Unitless 0

    =

    Unitless Unitless

    = 4

    O i f M ti R l ti

  • 7/24/2019 Student PresentatiFDons 2011

    58/102

    5

    Overview of Magnetic Relations

    Where

    ==relative permeability (material dependant)

    And = where =

    (number of acting moments per unit volume)

    SI CGS

    ==0(+ )

    =

    =0(1 +)

    ==+ 4

    =

    = 1 + 4

    H t i

  • 7/24/2019 Student PresentatiFDons 2011

    59/102

    6

    Hysteresis

    Ferromagnetic materials retain magnetic orientation

    Ferromagnetic materials exhibit different curves for

    directional field sweeps (+ to -, or - to +)

    Hi t

  • 7/24/2019 Student PresentatiFDons 2011

    60/102

    7

    History

    Developed in the late 1950s

    No good way to measure magnetic moments without

    considerable prior knowledge of material properties

    Force methods are very sensitive and require a field

    gradient Other specific techniques existed, but were not

    adaptable to many material classes

    Vibrating coil technique used a coil with the detectionaxis parallel to the applied field

    Idea modified by Dr. Simon Foner of MIT to vibrate the

    sample and use a coil perpendicular to the applied field

    VSM B i

  • 7/24/2019 Student PresentatiFDons 2011

    61/102

    8

    VSM Basics

    In a uniform magnetic field, a

    ferromagnetic sample is vibrated

    along the z axis

    The dipole field induces a current

    in the pickup coils, which isproportional to the magnetic

    moment

    Susceptibility is obtained as the

    slope of the M-H Curve

    Permeability is obtained as the

    slope of the B-H Curve

    x

    yz

    Mechanical Design

  • 7/24/2019 Student PresentatiFDons 2011

    62/102

    9

    Mechanical Design

    1) Loudspeaker Transducer2) Paper Cup Support

    3) Sample Holder Straw

    4) Reference Sample5) Sample

    6) Reference Coils

    7) Pickup Coils8) Magnets

    9) Housing

    Frequency Invariance

  • 7/24/2019 Student PresentatiFDons 2011

    63/102

    10

    Frequency Invariance

    Reference sample attached to sample holder

    High coercivity material

    Identical coil arrangement to pickup coils

    Loudspeaker vibrates the sample and reference sample

    at the same frequency

    Phase and Amplitude of coil voltages are directly related

    via the magnetic moment of the sample

    Time Varying Dipole Field

  • 7/24/2019 Student PresentatiFDons 2011

    64/102

    11

    Time-Varying Dipole Field

    Fixed Dipole Scalar Potential

    =

    3

    Time variant field

    1where

    1=

    =

    5

    Where the flux pattern is

    1

    The pattern allows for a variety of coil arrangements where the coil

    axis is along a flux line.

    Circuitry

  • 7/24/2019 Student PresentatiFDons 2011

    65/102

    12

    Circuitry

    Many options for output signal measurement

    Always a temperature controlled resistor in series with

    the pickup coils

    Voltage drop is proportional to magnetic moment, m Lock-in Amplifier to compare reference signal and sample

    signal.

    Null Amplifier from a calibrated diode bridge

    Reference signal is controlled with a potentiometer for

    precise voltage division to balance with the sample output

    Sensitivity

  • 7/24/2019 Student PresentatiFDons 2011

    66/102

    13

    Sensitivity

    Sensitivity depends on coil geometry

    With a 2 vertical coil method

    Susceptibility changes of 5x10-10can be measured

    Magnetic moment changes of 5x10-6emu

    Average stability of balanced signals is 1 part in 10,000

    Calibration

  • 7/24/2019 Student PresentatiFDons 2011

    67/102

    14

    Calibration

    Can be calibrated by 2 methods

    Using a sample of known magnetic properties and mass

    Usually 8mg of pure Nickel (high coercivity)

    For weakly magnetic samples of obscure shape First measure the sample in vacuum

    Then measure in pure O2 gas (well known susceptibility)

    The difference of the two gives the susceptibility of the

    sample, which is used to calibrate that specific shape

    Demagnitizing Factor

  • 7/24/2019 Student PresentatiFDons 2011

    68/102

    15

    Demagnitizing Factor

    Calibration is used to determine the Demagnitizing

    Factor,

    Once and m are determined, the BH curve can be

    extracted

    Note: SI equations only, CGS equations vary

    = 4

    = 4

    =+ 4=+ 4(1 )

    Sample values

    Sphere: = 3

    ,

    Infinite plane: = 4,

    Cylinder: = 2

    Other shapes are well

    documented

    Measurements

  • 7/24/2019 Student PresentatiFDons 2011

    69/102

    16

    Measurements

    Low-Conductivity Materials

    Spherical or ellipsoid samples are preferred

    Cubic crystals should be oriented 110 perpendicular to

    the z-axis

    High Conductivity Materials Demagnetization corrections are not necessary

    Paramagnetic Samples

    VSM can measure the magnetic field created byparamagnetic materials by the average value over the

    sample volume

    Sample Data

  • 7/24/2019 Student PresentatiFDons 2011

    70/102

    17

    Sample Data

    Actually emu

    Sources

  • 7/24/2019 Student PresentatiFDons 2011

    71/102

    18

    Sources

    FONER, S. "Versatile and Sensitive Vibrating-sample

    Magnetometer." Review of Scientific Instruments, 30.7 (1959):548-557.

    http://stephenmullens.co.uk/projectwork/Vibrating%20Sample%

    20Magnetometer.pdf

    http://www.lakeshore.com/pdf_files/systems/vsm/Permanent%20Magnet%20Paper.pdf

    http://magician.ucsd.edu/essentials/WebBookse7.html

    http://bohr.physics.berkeley.edu/classes/221/0708/notes/emunit

    s.pdf

    http://stephenmullens.co.uk/projectwork/Vibrating%20Sample%20Magnetometer.pdfhttp://stephenmullens.co.uk/projectwork/Vibrating%20Sample%20Magnetometer.pdfhttp://www.lakeshore.com/pdf_files/systems/vsm/Permanent%20Magnet%20Paper.pdfhttp://www.lakeshore.com/pdf_files/systems/vsm/Permanent%20Magnet%20Paper.pdfhttp://magician.ucsd.edu/essentials/WebBookse7.htmlhttp://magician.ucsd.edu/essentials/WebBookse7.htmlhttp://bohr.physics.berkeley.edu/classes/221/0708/notes/emunits.pdfhttp://bohr.physics.berkeley.edu/classes/221/0708/notes/emunits.pdfhttp://bohr.physics.berkeley.edu/classes/221/0708/notes/emunits.pdfhttp://bohr.physics.berkeley.edu/classes/221/0708/notes/emunits.pdfhttp://magician.ucsd.edu/essentials/WebBookse7.htmlhttp://magician.ucsd.edu/essentials/WebBookse7.htmlhttp://www.lakeshore.com/pdf_files/systems/vsm/Permanent%20Magnet%20Paper.pdfhttp://www.lakeshore.com/pdf_files/systems/vsm/Permanent%20Magnet%20Paper.pdfhttp://stephenmullens.co.uk/projectwork/Vibrating%20Sample%20Magnetometer.pdfhttp://stephenmullens.co.uk/projectwork/Vibrating%20Sample%20Magnetometer.pdf
  • 7/24/2019 Student PresentatiFDons 2011

    72/102

    Transmission ElectronMicroscopy (TEM)

    Jevon RaghubirECE-4813

    Fall 2011

    Dr. Alan Doolittle

    Why TEM?

  • 7/24/2019 Student PresentatiFDons 2011

    73/102

    2

    Why TEM?

    Limited image resolution in light microscopes

    Smallest distance that can be resolved by VLM:

    =0.61

    Around 300nm for green light (=550nm) w/ NA=1

    That is 1000 atom diameters

    Need to image details all the way down to the atomic level

    Solution: TEM

    Electron Wavelength

  • 7/24/2019 Student PresentatiFDons 2011

    74/102

    3

    Electron Wavelength

    =

    20(1 +

    202

    /2

    At high energies electrons approach the speed of light

    Relativistic effect must be taken into account

    Schematic of TEM

  • 7/24/2019 Student PresentatiFDons 2011

    75/102

    4

    Schematic of TEM

    Illumination system

    Illumination System (Electron Emission)

  • 7/24/2019 Student PresentatiFDons 2011

    76/102

    5

    Illumination System (Electron Emission)

    Field Emission

    Uses large electric fields at sharp points

    Electrons tunnel out of source

    Source: tungsten wire

    Thermionic Emission

    Uses heat

    Electrons gain enough energy to overcome natural barrier

    Sources:

    Tungsten filaments LaB6 crystals

    Electron Sources

  • 7/24/2019 Student PresentatiFDons 2011

    77/102

    6

    Electron Sources

    Thermionic emission source Field emission source

    LaB6 crystal

    Tungsten needle

    Illumination System (Electron Gun)

  • 7/24/2019 Student PresentatiFDons 2011

    78/102

    7

    Illumination System (Electron Gun)

    Thermionic electron gun

    Illumination System (Condenser Lenses)

  • 7/24/2019 Student PresentatiFDons 2011

    79/102

    8

    Illumination System (Condenser Lenses)

    Parallel electron beam

    TEM imaging

    Selected-area diffraction (SAD)

    Convergent beam

    STEM

    AEM

    Dependent on mode of operation

    Schematic of TEM

  • 7/24/2019 Student PresentatiFDons 2011

    80/102

    9

    Schematic of TEM

    The objective lens &

    stage

    Objective Lens (Cs Correction)

  • 7/24/2019 Student PresentatiFDons 2011

    81/102

    10

    Objective Lens (Cs Correction)

    Instrumental resolution is limited primarily by spherical

    aberration of the objective lens

    Image w/o Cs correction Image w/ Cs correction

    HRTEM Images

    Schematic of TEM

  • 7/24/2019 Student PresentatiFDons 2011

    82/102

    11

    Schematic of TEM

    Imaging system

    Imaging System

  • 7/24/2019 Student PresentatiFDons 2011

    83/102

    12

    Imaging System

    Post-specimen lenses

    Magnify signal transferred by objective lens

    Diffraction pattern

    Image

    Viewing images and DPs

    Fluorescent screen

    Photographic film

    CCD camera

    TEM Modes of Operation

  • 7/24/2019 Student PresentatiFDons 2011

    84/102

    13

    TEM Modes of Operation

    Diffraction mode

    Image mode

    Bright-field microscopy

    Block all diffracted beams and pass only transmitted

    electron beam Dark-field microscopy

    Allows diffracted beams and block transmitted electron

    beam

    High-resolution electron microscopy Admits transmitted beam and at least one diffracted beam

    Example Images

  • 7/24/2019 Student PresentatiFDons 2011

    85/102

    14

    Example Images

    DP from a single crystal Fe thin film

    BF TEM image of a specimen

    TEM Uses

  • 7/24/2019 Student PresentatiFDons 2011

    86/102

    15

    Crystal structure

    Lattice repeat distance

    Specimen shape

    Analytical measurements

    Chemical information

    Study of defects

    Failure analysis

    Advantages

  • 7/24/2019 Student PresentatiFDons 2011

    87/102

    16

    g

    High lateral spatial resolution compared to other type of

    microscopes

    High quality and detailed images

    Can produce wide range of secondary signals

    Backscattered electrons, auger electrons, characteristicsx-rays, elastically and inelastically electrons, etc.

    Wide range of applications that can be utilized in a

    variety of different scientific, educational and industrial

    fields

    Disadvantages

  • 7/24/2019 Student PresentatiFDons 2011

    88/102

    17

    g

    Limited depth resolution

    Gives 2D images for 3D specimens

    Specimen preparation

    Thinning procedure can affect both their structure and

    chemistry of specimen Time consuming

    Cost

    About $5 for each eV

    Types of Transmission Electron Microscopes

  • 7/24/2019 Student PresentatiFDons 2011

    89/102

    18

    yp p

    HRTEM (High-resolution)

    HVTEM (High-voltage)

    Can be damaging to specimen

    Huge

    IVTEM (Intermediate voltage)

    STEM (Scanning)

    AEM (Analytic)

    Example TEMs

  • 7/24/2019 Student PresentatiFDons 2011

    90/102

    19

    p

    HVTEM HRTEM

    References

  • 7/24/2019 Student PresentatiFDons 2011

    91/102

    20

    [1] D. Williams and B. Carter, Transmission Electron Microscopy A

    Textbook for Materials Science, Springer, 2004.

    [2] D. K. Schroder, Semiconductor Material and Device

    Characterization, Wiley & Sons, 2006.

    [3] C. Evans and R. Brundle, Encyclopedia of Materials

    Characterization, Butterworth-Heinemann, 1992.

    [4] W. R. Runyan, Semiconductor Measurements and

    Instrumentation, McGraw-Hill, 1998.

  • 7/24/2019 Student PresentatiFDons 2011

    92/102

    Alex Walker

    Raman Spectroscopy

  • 7/24/2019 Student PresentatiFDons 2011

    93/102

    Raman Spectroscopy

    Based on the effects of Raman effect, firstreported in 1928

    This is a vibrational spectroscopic techniquethat can detect both organic and inorganicspecies and measure the crystallinity ofsolids

    Advantages:

    Free from charging effects

    Sensitive to strain

    Raman Spectroscopy

  • 7/24/2019 Student PresentatiFDons 2011

    94/102

    Raman Spectroscopy

  • 7/24/2019 Student PresentatiFDons 2011

    95/102

    Types of Scattering

  • 7/24/2019 Student PresentatiFDons 2011

    96/102

    Types of Scattering

    Raman Shift

  • 7/24/2019 Student PresentatiFDons 2011

    97/102

    Raman Shift

    =

    o = excitation wavelength1 = Raman spectrum wavelength

    Raman Spectrum of cyclohexanone

    Raman Spectroscopy

  • 7/24/2019 Student PresentatiFDons 2011

    98/102

    Raman Spectroscopy

    Variations of Raman Spectroscopy

  • 7/24/2019 Student PresentatiFDons 2011

    99/102

    Variations of Raman Spectroscopy

    Surface Enhanced RamanSpectroscopy

    surface-sensitive technique

    that enhances Ramanscattering by moleculesabsorbed on rough metalsurfaces .

    Variations of Raman Spectroscopy

    http://..///upload.wikimedia.org/wikipedia/commons/5/51/Sers.jpg
  • 7/24/2019 Student PresentatiFDons 2011

    100/102

    Variations of Raman Spectroscopy

    Resonance Raman Spectroscopy Uses IR spectrum to identify unknown

    substances, measure the energy required tochange the vibrational state of a chemical

    compound, and bioinorganic materials.

    Ultraviolet Resonance Raman Spectroscopy

    Variations of Raman Spectroscopy

  • 7/24/2019 Student PresentatiFDons 2011

    101/102

    Raman Optical Activity reliant on the difference in intensity of

    Raman scattered right and left circularlypolarised light due to molecular chirality.

    Variations of Raman Spectroscopy

    Resources

    http://..///upload.wikimedia.org/wikipedia/commons/5/5a/ROA_pinene.PNG
  • 7/24/2019 Student PresentatiFDons 2011

    102/102

    Resources

    http://www.fdmspectra.com/fdm_raman_organics.htm http://en.wikipedia.org/wiki/Raman_spectroscopy http://en.wikipedia.org/wiki/Surface_Enhanced_Rama

    n_Spectroscopy

    http://en.wikipedia.org/wiki/Resonance_Raman_spectroscopy http://en.wikipedia.org/wiki/Raman_optical_activity http://en.wikipedia.org/wiki/Raman_optical_activity http://www.nano.org.uk/news/1368/

    http://www.andor.com/learning/applications/Raman_Spectroscopy/

    http://www.fdmspectra.com/fdm_raman_organics.htmhttp://www.fdmspectra.com/fdm_raman_organics.htmhttp://en.wikipedia.org/wiki/Raman_spectroscopyhttp://en.wikipedia.org/wiki/Surface_Enhanced_Raman_Spectroscopyhttp://en.wikipedia.org/wiki/Surface_Enhanced_Raman_Spectroscopyhttp://en.wikipedia.org/wiki/Resonance_Raman_spectroscopyhttp://en.wikipedia.org/wiki/Resonance_Raman_spectroscopyhttp://en.wikipedia.org/wiki/Raman_optical_activityhttp://en.wikipedia.org/wiki/Raman_optical_activityhttp://www.nano.org.uk/news/1368/http://www.andor.com/learning/applications/Raman_Spectroscopy/http://www.andor.com/learning/applications/Raman_Spectroscopy/http://www.andor.com/learning/applications/Raman_Spectroscopy/http://www.andor.com/learning/applications/Raman_Spectroscopy/http://www.nano.org.uk/news/1368/http://en.wikipedia.org/wiki/Raman_optical_activityhttp://en.wikipedia.org/wiki/Raman_optical_activityhttp://en.wikipedia.org/wiki/Resonance_Raman_spectroscopyhttp://en.wikipedia.org/wiki/Resonance_Raman_spectroscopyhttp://en.wikipedia.org/wiki/Surface_Enhanced_Raman_Spectroscopyhttp://en.wikipedia.org/wiki/Surface_Enhanced_Raman_Spectroscopyhttp://en.wikipedia.org/wiki/Raman_spectroscopyhttp://www.fdmspectra.com/fdm_raman_organics.htmhttp://www.fdmspectra.com/fdm_raman_organics.htm